Substrate and Sample Manipulators
DCA provides a wide range of substrate manipulators for molecular beam epitaxy and other thin film deposition applications. The standard manipulator for MBE has a PBN/PG/PBN heater element. This heater element has a pyrolytic graphite (PG) heater deposited on a pyrolytic boron nitride (PBN) substrate using chemical vapor deposition. After the heater filament has been processed an additional PBN layer is deposited to protect the heater. A multi zone heater is used for 4" and larger diameter substrates. Temperatures up to 1000 oC can be reached depending on the substrate.
SiC Heater Element
Silicon Carbide (SiC) heaters can be used at very high temperatures and in oxygen atmosphere. This heater is also recommended for Si/SiGe epitaxy.
An oxygen resistant heater stage is available for PLD and similar applications with high oxygen process pressures.
Temperatures up to 1400 oC can be reached depending on the sample size and material.
Sample/substrate Manipulation Stages
The sample/substrate manipulators can be provided with a wide range of XYZ-stages depending on the application. The top photo shows a substrate manipulator with 3" heater stage with PBN heater and an XYZ manipulator. The second photo shows sample manipulator with motorized +/- 25 mm XY scanning for large area pulsed laser deposition.
Product Range
- Sample sizes: 1", 2", 3", 4", 6", 200 mm or 300 mm max. diameter
- PBN/PG/PBN or SiC heater element
- Z-travel 50, 100, 150 or 200 mm. Longer travel lengths on request
- XY-table +/- 10 mm or +/- 25 mm
- Stepper motor drive for azimuthal rotation
- Stepper motor drives for XY-table
- Stepper motor drive for Z-travel
Retrofit Substrate Manipulators for Riber Compact 21 MBE
DCA also provides retrofit substrate manipulators for Compact 21 MBE systems. These are compatible with the Compact 21 molybdenum blocks and sample holders.
