R450 Research MBE System
The inclined growth chamber gives good access to the source area and provides high filling ratios for the effusion cells. The system left shows the R450 system with single wafer load lock and a small ion pumped buffer chamber.
The growth chamber is designed for easy servicing with each source shutter mounted on a separate port.
The R450 growth chamber can be provided with either single part or two part liquid nitrogen cryo panel. The system on the left shows the growth chamber with two part cryo panel consisting of a main cryo panel surrounding the substrate area and a second panel mounted on the source flange.
The R450 MBE system shown on the left was delivered to Prof. Fritz Henneberger's group at the Humboldt University of Berlin, Department of Physics. This system is used for the growth of ZnO, ZnMgO as well as ZnMgO/ZnO quantum well structures.
Large capacity single and dual filament effusion cells and valved crackers for Arsenic and Phosphorus are available for this system.