E300 Electron Beam Evaporator

Electron Beam Evaporation System

The E300 is a compact thin film deposition system with a multi-pocket electron gun. The system comes with a small volume load lock chamber and can handle substrates up to 4" in diameter. The deposition chamber is provided with a sample manipulator which allows the sample stage to be tilted +/- 90 degrees from horizontal position.

The side mounted UHV multi-pocket electron beam source can have up to 4 x 15 cc crucibles.

The standard system includes a cryo pump for the deposition chamber and a small oil-free turbo pump unit for the load lock. Several options for sample heating and manipulation are available with this system.

This compact electron beam evaporator is in use in several laboratories including the NANO-group of the Low Temperature Laboratory at Helsinki University of Technology and NEST-INFM at the Scuola Normale Superiore in Pisa.